In semiconductor manufacturing industry, traditional scheduling rules are not conducive to improving production capacity to autonomously adjust based on real-time status. To fill this gap, this study proposes a dynamic dispatching rule based on self-organization (DDRSO) to autogenerate optimal scheduling scheme through mechanisms of interaction, coordination and competition. Besides, an extended DDRSO is proposed to further consider hot lots and transient dynamic bottlenecks. Both DDRSO and E-DDRSO are designed from three aspects: role definition of self-organization units, negotiation mechanism among self-organization units, and decision methods. This research adopts a benchmark industrial manufacturing system to illustrate the availability of the proposed approach. Compared with heuristic dispatching strategies, DDRSO achieves improvement on MOV, TH and ODR by 4.9%, 9.06% and 20.23%, respectively. Meanwhile, E-DDRSO performs better than DDRSO under all workload levels. In addition, compared with a flexible dispatching method BPSO-SVM, E-DDRSO also obtain better performances, especially improvement on CT by 16.51%.

在半导体制造业中，传统的调度规则不利于提高生产能力以基于实时状态进行自主调整。为了填补这一空白，本研究提出了一种基于自组织（DDRSO）的动态调度规则，以通过交互，协调和竞争机制自动生成最佳调度方案。此外，提出了扩展的DDRSO，以进一步考虑热批次和瞬态动态瓶颈。DDRSO和E-DDRSO都从三个方面进行设计：自组织单元的角色定义，自组织单元之间的协商机制以及决策方法。本研究采用基准工业制造系统来说明所提出方法的可用性。与启发式调度策略相比，DDRSO的MOV有所提高，TH和ODR分别为4.9％，9.06％和20.23％。同时，在所有工作负载级别下，E-DDRSO的性能均优于DDRSO。此外，与灵活的调度方法BPSO-SVM相比，E-DDRSO还具有更好的性能，尤其是CT提升了16.51％。