The wettability transition of an ion-beam-etched micro-pillar array surface is reported in the present study. The micro-pillar array, made of negative photoresist SU-8, was fabricated by ultraviolet lithography. The results indicate that the combination of the micro-pillar array and ion-beam etching technique can easily regulate surface wettability, which can be changed from hydrophobicity to super-hydrophilicity. Moreover, the super-hydrophilic property of the textured surface can be significantly affected by the etching time and etching energy, because the ion-beam etching could alter the shape and height of the micro-structure as well as the chemical composition of the surface. When a 2 µ l water droplet spreads on the etched micro-pillar array surface, the contact angle (CA) decreases to almost 0° within 144 ms, indicating ultrafast spreading of the water droplet on the textured surface. It was found that the CA of the fabricated surface remained the same after two wee...

中文翻译：

---

通过离子束蚀刻的SU-8微柱阵列实现超湿

在本研究中报道了离子束刻蚀的微柱阵列表面的润湿性转变。由负光刻胶SU-8制成的微柱阵列通过紫外光刻法制造。结果表明，微柱阵列和离子束刻蚀技术的结合可以很容易地调节表面的润湿性，可以从疏水性变为超亲水性。而且，纹理化表面的超亲水性可能会受到蚀刻时间和蚀刻能量的显着影响，因为离子束蚀刻会改变微观结构的形状和高度以及表面的化学成分。当2 µl水滴散布在蚀刻的微柱阵列表面上时，接触角（CA）在144毫秒内减小到几乎为0°，表示水滴在带纹理的表面上的超快散布。发现经过两次湿润后，人造表面的CA保持不变。