Abstract A piezoelectric geophone is a vibration transducer that converts mechanical vibrations into electrical signals via the piezoelectric effect. At present, the commonly used sensitive component of the conventional piezoelectric geophone is piezoelectric ceramic (PZT) material, which has low structural flexibility and high natural frequency. This paper reports a piezoelectric geophone based on polyvinylidene fluoride (PVDF) film with a sensitive unit composed of PVDF film and spiral cantilever beam, which can increase the sensitivity and reduce the low-frequency cutoff frequency. Firstly, the PVDF piezoelectric film is introduced, and the sensitive unit with PVDF piezoelectric film and spiral cantilever beam is designed. Secondly, the signal conditioning circuit and the digital module circuit are designed according to the characteristics of the detector and the test environment. Finally, the performance tests and fabrication of the geophone are carried out. The results indicate that the piezoelectric geophone has a stable sensitivity of 230 mV/m/s2 in the range of 4–90 Hz, which are superior to the existing piezoelectric geophone.

中文翻译：

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基于PVDF薄膜的新型压电地震检波器的设计、组装与测试

摘要 压电地震检波器是一种通过压电效应将机械振动转化为电信号的振动换能器。目前，常规压电地震检波器常用的敏感元件是压电陶瓷（PZT）材料，其结构柔性低，固有频率高。本文报道了一种基于聚偏二氟乙烯（PVDF）薄膜的压电地震检波器，其敏感单元由PVDF薄膜和螺旋悬臂梁组成，可以提高灵敏度并降低低频截止频率。首先介绍了PVDF压电薄膜，设计了带有PVDF压电薄膜和螺旋悬臂梁的敏感单元。第二，根据探测器的特点和测试环境设计了信号调理电路和数字模块电路。最后，进行了地震检波器的性能测试和制作。结果表明，压电地震检波器在 4~90 Hz 范围内具有 230 mV/m/s2 的稳定灵敏度，优于现有的压电地震检波器。