Abstracts In the process of surface treatment by electron cyclotron resonance (ECR) plasma source, the magnetic field plays an important role in introducing the confinement of electrons. To investigate the influence of the magnetic field configuration on electron distribution conditions, this study presents a two-dimensional model of ECR plasma source. According to the resulting distributions of the electron density and temperature, it is found that the plasma density in the mirror magnetic field is higher than that in the divergent magnetic field. At the same time, the application of the mirror magnetic field is valid for decreasing the electron temperature due to both effects of plasma confinement and particle collisions. Furthermore, the decrease of the minimum strength of the mirror magnetic field and the increase of the strength at the injection side contribute to higher electron density and lower electron temperature owing to the gradient of magnetic field.

中文翻译：

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镜面磁场强度对电子回旋共振等离子体源中电子分布影响的数值模拟

摘要 在电子回旋共振(ECR)等离子体源表面处理过程中，磁场在引入电子约束方面起着重要作用。为了研究磁场配置对电子分布条件的影响，本研究提出了 ECR 等离子体源的二维模型。根据得到的电子密度和温度分布，发现镜面磁场中的等离子体密度高于发散磁场中的等离子体密度。同时，由于等离子体约束和粒子碰撞的双重作用，镜面磁场的应用对于降低电子温度是有效的。此外，