This paper proposed a novel structure to improve modulation bandwidth of light-emitting diode. The SiO₂-ITO quasi-symmetrical waveguide structure and SiO₂-Ag grating are used to enhance the internal quantum efficiency. The surface plasmons induced by Ag can effectively increase the spontaneous emission rate and carrier recombination lifetime. Diamond is used to improve the heat dissipation performance of the chip, and the injection current density of LED can be greatly improved. The COMSOL software is used to calculate the electric field mode and temperature. The electric field mode distribution, average electric field mode and temperature distribution are obtained. The results reveal that the internal quantum efficiency and the heat dissipation performance can be improved simultaneously, providing a favorable condition for the development of the high bandwidth LED.

本文提出了一种新颖的结构来提高发光二极管的调制带宽。SiO ₂ -ITO准对称波导结构和SiO ₂-Ag光栅用于增强内部量子效率。Ag诱导的表面等离子体激元可以有效地提高自发发射速率和载流子复合寿命。金刚石用于改善芯片的散热性能，可以大大提高LED的注入电流密度。COMSOL软件用于计算电场模式和温度。获得了电场模式分布，平均电场模式和温度分布。结果表明，可以同时提高内部量子效率和散热性能，为高带宽LED的发展提供了有利条件。