Hard silicon carbonitride coatings are prepared using Ar and Ar (10 vol.% He) laser plasma from hexamethyldisilazane (HMDS) [(CH3)3Si]2NH and HMDS+benzene vapors. The coatings are characterized by infrared (IR), Raman, and X-ray photoelectron spectroscopies, transmission electron microscopy, and atomic force microscopy. The obtained coatings are amorphous and uniform in composition and over the film thickness. The microhardness of coatings synthesized on steel from a HMDS+ benzene mixture increases from 12 GPa to 18 GPa provided that other parameters remain constant.

中文翻译：

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在激光等离子体中沉积来自六甲基二硅氮烷 (HMDS) 和 HMDS+苯蒸气的硬碳氮化硅涂层

使用来自六甲基二硅氮烷 (HMDS) [(CH3)3Si]2NH 和 HMDS+苯蒸气的 Ar 和 Ar（10 vol.% He）激光等离子体制备硬碳氮化硅涂层。涂层的特征在于红外 (IR)、拉曼和 X 射线光电子能谱、透射电子显微镜和原子力显微镜。获得的涂层是无定形的并且在组成和膜厚度上均一。如果其他参数保持不变，由 HMDS+ 苯混合物在钢上合成的涂层的显微硬度从 12 GPa 增加到 18 GPa。