Multiscale wrinkled structures are widely used in practical applications, such as smart adhesion, surface engineering, and stretchable electronics owing to their easy and low-cost strategy for controlling surface morphologies. This study demonstrates a facile technique for creating multiscale wrinkles of fluorocarbon thin films deposited on soft and stiff polydimethylsiloxane (PDMS) substrates by regulating the elastic properties of the substrates. The elastic properties of the substrates was changed by varying the crosslinking conditions and amount of crosslinking agent. The wrinkling structures were strongly influenced by the elastic properties of the substrate during a fluorocarbon polymer sputtering process. For the stiff PDMS substrates, wrinkles with periodic and sinusoidal patterns were observed due to the thermal compression of the bilayer system after deposition. Spontaneous hierarchical structures were generated on soft PDMS substrates by the penetration of fluorocarbon molecules into the PDMS substrates during the sputtering process.

多尺度起皱结构由于其简单且低成本的控制表面形态的策略而广泛用于实际应用中，例如智能粘合，表面工程和可拉伸电子产品。这项研究证明了一种通过调节基材的弹性特性，在柔软而坚硬的聚二甲基硅氧烷（PDMS）基材上沉积多尺度皱纹的碳氟化合物薄膜的技术。通过改变交联条件和交联剂的量来改变基材的弹性性能。在氟碳聚合物溅射过程中，起皱结构受到基材弹性特性的强烈影响。对于硬质PDMS基材，由于沉积后双层系统的热压缩，观察到具有周期性和正弦形图案的皱纹。通过在溅射过程中碳氟化合物分子渗透到PDMS基板中，在柔软的PDMS基板上产生自发的分层结构。