Contactless sensors with CMOS on-chip antennas use only the top thick metal for the polarization antenna due to the low inductance contribution of the bottom (thin) CMOS metals adding only resistance to the antenna. In this letter, a twolayer inductor (thick top metal layer inductor in series with the bottom thin four-layer metal inductor) configuration was proposed for wireless polarization (by electromagnetic induction). The design proposed was simulated and fabricated in a 0.18-μm CMOS process. The on-chip inductor powers a chip with a 1-mW load at a distance of 2 mm coupled with an external wireless power transmitter at 13.5 MHz with a 30-dBm output. The two-layer inductor configuration reduces the area required for the on-chip inductor by 38% and increases the on-chip inductor quality factor by 25% compared with a single-layer configuration, thus reducing the cost of fabricating fully integrated contactless sensors using only CMOS technologies.

中文翻译：

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用于低成本全集成非接触式供电传感器的 0.18μm CMOS 片上电感器


具有 CMOS 片上天线的非接触式传感器仅使用顶部厚金属作为极化天线，因为底部（薄）CMOS 金属的低电感贡献仅增加天线的电阻。在这封信中，提出了一种用于无线极化（通过电磁感应）的双层电感器（厚顶部金属层电感器与底部薄四层金属电感器串联）配置。所提出的设计在 0.18μm CMOS 工艺中进行了模拟和制造。片上电感器在 2 mm 的距离内为具有 1 mW 负载的芯片供电，并与 13.5 MHz 的外部无线电源发射器耦合，输出功率为 30 dBm。与单层配置相比，两层电感器配置将片上电感器所需的面积减少了 38%，并将片上电感器品质因数提高了 25%，从而降低了使用仅 CMOS 技术。