This paper reports the innovative design of three degrees of freedom ultrasonic elliptical vibration tool holder (3-DOF UEVTH) based on coupled resonance modes. The purpose of the 3-DOF UEVTH was to fabricate a unique microgroove (μ-groove) pattern compared to traditional cutting (TC). The 3-DOF UEVTH consisted of three key components: a prismatic horn, a backed mass, and a full set of three sandwiched piezo actuators. Modal analysis was applied to determine the 3-DOF UEVTH final dimension. The 3-DOF UEVTH operated in a natural frequency of approximately 24 kHz, which was verified by both simulations and experimental assessments. The 3-DOF UEVTH produced an amplitude on the micro-scale at a resonance frequency of approximately 0.42, 0.5, and 0.6 μm for x-, y- and z-axis directions, respectively. The transient analysis was performed to estimate the 3D-elliptical trajectory, and the device feasibility was examined during microgrooving (μ-grooving) on AISI 1045 material. An excellent topography was obtained using this innovative design.

本文报告了基于耦合共振模式的三自由度超声椭圆振动工具支架（3-DOF UEVTH）的创新设计。与传统切割（TC）相比，3-DOF UEVTH的目的是制造独特的微沟槽（μ沟槽）图案。3-DOF UEVTH由三个关键部件组成：一个棱形的号角，一个有底的质量以及全套的三个夹层压电执行器。应用模态分析来确定3-DOF UEVTH最终尺寸。3-DOF UEVTH在大约24 kHz的固有频率下运行，这已通过仿真和实验评估得到了验证。3-DOF UEVTH在x轴，y轴和z轴方向的共振频率分别为0.42、0.5和0.6μm的情况下，在微尺度上产生了振幅。进行瞬态分析以估计3D椭圆形轨迹，并在AISI 1045材料上进行微刻槽（μ刻槽）期间检查了设备的可行性。使用此创新设计，可获得出色的地形。