Proposed work consist of simple and micro size optical MEMS based displacement sensor for detection of muscle movement in human body. Optical MEMS based structure, analyzed with rods-in air and hole-in slab configuration of photonic crystal. Remarkable shift in wavelength is observed in RIA configuration with high quality factor of 3245 compare to holes in slab in the photonic sensing structure with Q factor 1456. Optical sensitivity of device with rods in air configuration is 350 nm/RIU is obtained and from the result, the distinctly visible shift in wavelength is found to be optimum for fabrication of projected device. Proposed work is applicable for the muscle movement of human body during medical diagnosis and for daily life activities.

拟议的工作包括基于微型微光学MEMS的位移传感器，用于检测人体中的肌肉运动。基于光学MEMS的结构，利用光子晶体的棒状空气和孔状平板结构进行分析。与质量因子为1456的光子传感结构中的平板中的孔相比，在RIA配置中观察到波长的明显偏移，其品质因数为3245。获得的杆状器件在空气配置中的光学灵敏度为350 nm / RIU，从结果可知因此，发现明显可见的波长偏移对于制造投影设备是最佳的。拟议的工作适用于医学诊断期间人体的肌肉运动以及日常生活活动。