Interdigitated electrodes (IDEs) on dielectric films is an important electrode design in electrical components such as transducers and sensors. Further development and use of IDEs for characterization of the in-plane properties of dielectric films requires models for the capacitance, particularly when used in a multilayer stack. Previous models for the capacitance have permitted erroneous boundary conditions between layers with associated limitations to accuracy. In this work we present a new model based on fulfilling the boundary conditions between layers with different dielectric constant. We further demonstrate how the model can be used to calculate the in-plane dielectric constant and polarization of BaTiO 3 films. The model is shown to outperform previous models using both the experimental data from BaTiO 3 films on SrTiO 3 substrates and finite element method simulations of the corresponding case. One important advantage compared to previous w...

中文翻译：

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带有叉指电极的薄膜的平面内介电常数的统一计算方法

介电膜上的叉指电极（IDE）是电子元件（例如换能器和传感器）中重要的电极设计。IDE的进一步开发和使用以表征介电膜的面内特性需要电容模型，尤其是在多层堆叠中使用时。先前的电容模型已经允许层之间的错误边界条件以及对精度的相关限制。在这项工作中，我们提出了一个新模型，该模型基于满足具有不同介电常数的层之间的边界条件。我们进一步演示了该模型如何用于计算BaTiO 3膜的面内介电常数和极化。使用来自SrTiO 3衬底上的BaTiO 3膜的实验数据以及相应情况的有限元方法模拟，该模型表现出优于先前的模型。与以前的产品相比，一个重要的优势是...