Anatase-phased TiO2 films were prepared at different temperatures (350, 400, 450 and 500∘C) using automated nebulizer spray pyrolysis (ANSP) method. The structural study (XRD) revealed the amorphous nature at 350∘C and remaining samples (400, 450 and 500∘C) show the tetragonal structure with 2[Formula: see text], 38.43, 48.49 and 55.54 corresponding to (101), (004), (200) and (105) reflected planes and it is well fitted with standard data. The compositional XPS analysis confirmed the core level primary element of Ti 2p, O 1s and valance band (VB) of Ti 3p, Ti 3s, O 2s peaks in the prepared samples. The 3D optical profilometer has shown that the thickness of the prepared films was decreased by increase in temperature. The AFM study exhibited average roughnesses (Ra) of the prepared films such as 0.058, 0.147, 0.176 and 0.194[Formula: see text]nm, respectively. The surface morphological study of FESEM has shown the cracked uneven distributed nature (350∘C) turn into evenly distributed closed packed agglomerated particles by the influence of temperature. The oscillating nature of transmittance (%) with redshift of the sharp absorption edge was observed in UV–Vis–NIR spectrophotometer and found the bandgap value about 3.58[Formula: see text]eV to 3.33[Formula: see text]eV through Tauc’s relation. The gas-sensing behavior has shown better response to C2H6O reducing gas at 300∘C operating temperature with 150 ppm gas concentration.

中文翻译：

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均相锐钛矿相 TiO2 薄膜表征和气敏行为的温度依赖性

锐钛矿相TiO2在不同温度下制备薄膜（350、400、450 和 500∘C) 使用自动雾化器喷雾热解 (ANSP) 方法。结构研究 (XRD) 揭示了在 350∘C 和剩余样品（400、450 和 500∘C) 显示四方结构，其中 2[公式：见正文]、38.43、48.49 和 55.54 对应于 (101)、(004)、(200) 和 (105) 反射平面，并且与标准数据非常吻合。成分XPS分析证实了所制备样品中Ti 2p、O 1s 的核心水平主元素和Ti 3p、Ti 3s、O 2s 峰的价带(VB)。3D 光学轮廓仪表明，制备的薄膜的厚度随着温度的升高而降低。AFM 研究显示所制备薄膜的平均粗糙度 (Ra) 分别为 0.058、0.147、0.176 和 0.194[公式：见正文]nm。FESEM 的表面形貌研究表明裂纹不均匀分布的性质（350∘c) 受温度的影响，变成均匀分布的密闭团聚颗粒。在 UV-Vis-NIR 分光光度计中观察到透射率 (%) 的振荡性质和尖锐吸收边的红移，通过 Tauc 的关系发现带隙值约为 3.58[公式：见正文]eV 至 3.33[公式：见正文]eV . 气体传感行为对 C 表现出更好的响应2H6O 还原气体在 300∘C 工作温度，气体浓度为 150 ppm。