Abstract CrN coatings are often brittle and prone to abrupt failure. Incorporation of Ni is known to have significant effects on the chemical composition, microstructure and mechanical behaviour of chromium nitride coatings synthesised by PVD, and thus imparting toughness. In this study, a series of NiCrN coatings, with varying Ni concentrations, were deposited onto AISI M2 tool steel substrates through closed-field unbalanced magnetron sputtering ion plating (CFUMSIP). The phase compositions, microstructure, mechanical properties and deformation behaviour of the coatings were characterised by XRD, AFM, FIB, TEM/EDS and indentation testing. Residual stresses of these as-prepared coatings were measured by the XRD-sin2ψ method. A columnar structure was observed in all coatings, although grain refinement at higher NiCr target currents was noted. High hardness values of ~20 GPa were found in the coatings with the lower Ni (~5–14 at%) contents, associated with the effects of solid solution hardening, high compressive residual stress and grain refinement. Moreover, significant damage-tolerance, coupled with good hardness values (greater than ~12 GPa), was found in the NiCrN coatings deposited at INiCr ≥ 2 A. The presence of a metallic nickel-rich phase, together with nanoscale porosity, may contribute to stress dissipation and help maintain structural integrity.

中文翻译：

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通过添加 Ni 来协调纳米结构 CrN 涂层的机械响应

摘要 CrN 涂层通常很脆，容易发生突然失效。众所周知，Ni 的加入对 PVD ​​合成的氮化铬涂层的化学成分、微观结构和机械性能有显着影响，从而赋予韧性。在这项研究中，一系列具有不同 Ni 浓度的 NiCrN 涂层通过闭场不平衡磁控溅射离子镀 (CFUMSIP) 沉积在 AISI M2 工具钢基材上。通过XRD、AFM、FIB、TEM/EDS和压痕测试对涂层的相组成、微观结构、力学性能和变形行为进行了表征。通过XRD-sin2ψ 方法测量这些制备好的涂层的残余应力。在所有涂层中都观察到柱状结构，尽管注意到在较高的 NiCr 目标电流下晶粒细化。在具有较低 Ni（~5-14 at%）含量的涂层中发现~20 GPa 的高硬度值，这与固溶硬化、高压缩残余应力和晶粒细化的影响有关。此外，在以 INiCr ≥ 2 A 沉积的 NiCrN 涂层中发现了显着的损伤容限和良好的硬度值（大于 ~12 GPa）。金属富镍相的存在以及纳米级孔隙率可能有助于以消除应力并帮助保持结构完整性。