A paraffin-based frequency reconfigurable antenna operating at 100 GHz is reported in this article. Paraffin is a mechanical phase-change material (PCM) that undergoes reversible solid-liquid volumetric change of approximately 15%. In addition, due to its low dielectric loss, this material is suitable for certain electromagnetic applications such as antennas at the millimeter-wave band often defined as 30 to 300 GHz. In this work, paraffin-based micro actuators forming variable capacitors are integrated with a slot antenna structure. Here, paraffin is encapsulated with a dielectric layer and actuated using a Joule heater. A variable capacitor is formed between a metal layer patterned on top of the paraffin and the ground layer. Following multi-physics simulation steps, prototype antennas are fabricated and tested. With a low actuation voltage of 5.4 V, 1.4 $\mu \text{m}$ of displacement and 15.3% change in capacitance are achieved. Actuation and switch off time of the device is found to be 5.7 ms and 1.8 ms, respectively. Performance of the reconfigurable antenna is evaluated through on-wafer probe measurements. The antenna covers the bandwidth of 94.1–104.1 GHz ( $S_{11} < -10$ dB) and the resonance frequency shift of 6.8 GHz is achieved. Applications of such reconfigurable antenna includes wireless communication, radars, and biomedical imaging. [2020-0180]

中文翻译：

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工作频率为 100 GHz 的基于石蜡的可重构天线

本文报道了一种工作在 100 GHz 的基于石蜡的频率可重构天线。石蜡是一种机械相变材料 (PCM)，可发生约 15% 的可逆固液体积变化。此外，由于其低介电损耗，这种材料适用于某些电磁应用，例如通常定义为 30 至 300 GHz 的毫米波段天线。在这项工作中，形成可变电容器的基于石蜡的微致动器与缝隙天线结构集成在一起。在这里，石蜡用介电层封装，并使用焦耳加热器启动。可变电容器形成在石蜡顶部图案化的金属层和接地层之间。在多物理场仿真步骤之后，原型天线被制造和测试。具有 5 的低驱动电压。4 V、1.4 $\mu \text{m}$ 的位移和 15.3% 的电容变化得以实现。发现设备的启动和关闭时间分别为 5.7 毫秒和 1.8 毫秒。可重构天线的性能通过晶圆上探针测量进行评估。天线覆盖了 94.1–104.1 GHz ($S_{11} < -10$ dB) 的带宽，并实现了 6.8 GHz 的谐振频移。这种可重构天线的应用包括无线通信、雷达和生物医学成像。[2020-0180] -10$ dB) 并实现了 6.8 GHz 的谐振频移。这种可重构天线的应用包括无线通信、雷达和生物医学成像。[2020-0180] -10$ dB) 并实现了 6.8 GHz 的谐振频移。这种可重构天线的应用包括无线通信、雷达和生物医学成像。[2020-0180]