Printed sensors that rely on low-cost substrate materials and additive fabrication processes are needed for wearable and disposable device applications. A critical challenge associated with currently available printed sensors is their inferior performance compared with sensors fabricated by thin-film deposition or nanoscale assembly. In this paper, we report on an inkjet-printed hydrogen peroxide (H2O2) sensor possessing a sensitivity >30X higher than those made by conventional sputtering. The key enabling step in our printing approach is low-temperature plasma conversion of an inorganic salt precursor to produce silver (Ag). The resistivity of the printed Ag measured by four-point probe is found to be only 6X higher than that of bulk Ag and 5X higher than that of sputtered Ag. Additionally, the surface roughness of the printed Ag characterized by optical profilometry and atomic force microscopy is much higher than that of the sputter-deposited Ag. The resulting large surface area of the printed Ag leads to a significantly improved reaction rate with H2O2, and is responsible for the increased sensitivity of the sensor.

中文翻译：

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等离子活化无机金属盐油墨提高灵敏度的喷墨印刷过氧化氢传感器

可穿戴和一次性设备应用需要依赖低成本基板材料和增材制造工艺的印刷传感器。与通过薄膜沉积或纳米级组装制造的传感器相比，与当前可用的印刷传感器相关的一个关键挑战是它们的性能较差。在本文中，我们报告了一种喷墨印刷的过氧化氢 (H2O2) 传感器，其灵敏度比传统溅射制造的传感器高 30 倍以上。我们印刷方法中的关键步骤是无机盐前体的低温等离子体转化以生产银 (Ag)。发现通过四点探针测量的印刷银的电阻率仅比块状银高 6 倍，比溅射银高 5 倍。此外，通过光学轮廓仪和原子力显微镜表征的印刷银的表面粗糙度远高于溅射沉积的银。由此产生的印刷 Ag 的大表面积显着提高了与 H2O2 的反应速率，并提高了传感器的灵敏度。