In this paper, we demonstrate a dual frequency oven-controlled MEMS resonator that can be designed to have an output frequency of 1.27 Mhz or 13 Mhz depending on the crystal orientation of the device. Both modes operate based on closed-loop thermal compensation that can offer PPB (parts-per-billion) level temperature stability over a wide temperature range using low power and exhibit strong shock robustness. As the device is rotated 45- degrees with respect to the $< 100>$ plane of the wafer, the two modes used in oven control exhibit a unique temperature coefficient of frequency (tcF) reversal that allows selection of the output frequency for timing reference applications. The stiffer inplane mode has better temperature stability and shock resistance whereas the plate-bending mode offers ease of drive. Both devices retain stability performance after multiple 12,000g level shocks. [2020-0143]

中文翻译：

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JMEMS Letters 具有温度稳定性和抗冲击性的晶体取向相关双频烘烤 MEMS 谐振器

在本文中，我们展示了一种双频恒温 MEMS 谐振器，它可以设计为具有 1.27 Mhz 或 13 Mhz 的输出频率，具体取决于器件的晶体取向。两种模式都基于闭环热补偿运行，可以使用低功耗在很宽的温度范围内提供 PPB（十亿分之一）级别的温度稳定性，并具有很强的抗冲击能力。当器件相对于晶圆的 $<100>$ 平面旋转 45 度时，烤箱控制中使用的两种模式表现出独特的频率温度系数 (tcF) 反转，允许选择输出频率作为时序参考应用程序。更硬的面内模式具有更好的温度稳定性和抗冲击性，而板弯曲模式则易于驱动。两款设备在多次 12,000g 级冲击后均保持稳定性能。[2020-0143]