An overview of microelectromechanical systems (MEMS) resonators for frequency reference and timing applications is presented. The progress made in the past few decades in design, modeling, fabrication and packaging of MEMS resonators is summarized. In particular, the state-of-the-art technologies for improving the overall performance of MEMS resonators, such as quality factor ( $Q$ ), motional impedance, temperature sensitivity, and initial frequency uniformity, are reviewed in detail. The challenges and opportunities during the commercialization of MEMS resonators are also stated, and future development trends driven either by technology or market are outlined. This paper intends to provide an outlook for possible research directions of MEMS resonators in frequency reference and timing applications. With outstanding reliability, unique multi-frequency functionality on a single chip, and high accuracy, MEMS resonators show great potential for replacing the quartz crystal resonators which have been dominating the timing market since 1920s. [2020-0106]

中文翻译：

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用于频率参考和定时应用的 MEMS 谐振器

概述了用于频率参考和定时应用的微机电系统 (MEMS) 谐振器。总结了过去几十年在 MEMS 谐振器的设计、建模、制造和封装方面取得的进展。特别是，详细回顾了用于提高 MEMS 谐振器整体性能的最先进技术，例如品质因数 ($Q$)、运动阻抗、温度敏感性和初始频率均匀性。阐述了MEMS谐振器商业化过程中的挑战和机遇，并概述了技术或市场驱动的未来发展趋势。本文旨在为MEMS谐振器在频率参考和时序应用中可能的研究方向提供展望。凭借出色的可靠性，MEMS 谐振器在单芯片上具有独特的多频功能和高精度，显示出取代石英晶体谐振器的巨大潜力，石英晶体谐振器自 1920 年代以来一直主导着计时市场。[2020-0106]