A silicon MEMS resonator which forms an optical cavity with its package is self-excited and interrogated with a CW laser beam at telecom wavelengths delivered to the device through optical fiber. Self-oscillation at 68 kHz occurs with a buckled resonator for laser powers >7 mW. After removal of polarization effects from fiber motion, the resonant frequency is found to vary with acceleration with a scale factor of 0.13 Hz/g even in the absence of an applied internal electric field. This surprising sensitivity is due to spatial variation of the absorbed power within the cavity and is consistent with a simple model of the device. As initially fabricated, self-oscillation occurs over a limited 1.5 °C temperature range but with a SiN antireflection layer on the outer surface, the device can self-oscillate continuously from 0 to 80 °C. A fractional bias instability <; 10-9 is obtained by minimizing fiber vibration. A second, higher frequency mode can also be self-excited. [2020-0142]

中文翻译：

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采用 CW 激光激励的谐振 MEMS 加速度计


与其封装形成光学腔的硅 MEMS 谐振器是自激的，并用通过光纤传送到设备的电信波长的 CW 激光束进行询问。对于激光功率为 >7 mW 的屈曲谐振器，会出现 68 kHz 的自振荡。消除光纤运动的偏振效应后，发现即使在没有施加内部电场的情况下，谐振频率也会随着加速度的变化而变化，比例因子为 0.13 Hz/g。这种令人惊讶的灵敏度是由于腔内吸收功率的空间变化造成的，并且与设备的简单模型一致。最初制造时，自振荡发生在 1.5 °C 的有限温度范围内，但由于外表面有 SiN 抗反射层，该器件可以在 0 至 80 °C 的温度范围内连续自振荡。部分偏差不稳定性<； 10-9是通过最小化纤维振动获得的。第二种更高频率的模式也可以是自激的。 [2020-0142]