Phononic crystals/metamaterials are attracting increasing interest because of their large variety of applications at both the macro and micro scales. In this work, a new metamaterial plate (metaplate) composed of innovative phononic crystal unit-cells is presented, numerically studied, fabricated at the microscale and experimentally tested. Numerical simulations and experimental tests demonstrate a complete 3D phononic bandgap that guarantees a complete vibration isolation in a certain range of frequency. Moreover, its compatibility with Micro Electro Mechanical Systems (MEMS) fabrication processes suggests applications for vibration isolation of MEMS resonant devices. The measured transmission diagram shows a -30 dB attenuation level, which is in good agreement with numerical predictions. The proposed design opens up new perspectives for the development of vibration isolation applications for MEMS resonators. [2020-0069].

中文翻译：

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MEMS 隔振 Metaplate 的设计、制造和实验验证


声子晶体/超材料因其在宏观和微观尺度上的广泛应用而吸引了越来越多的兴趣。在这项工作中，提出了一种由创新声子晶体晶胞组成的新型超材料板（metaplate），并进行了数值研究、微尺度制造和实验测试。数值模拟和实验测试证明了完整的3D声子带隙，保证了在一定频率范围内的完全隔振。此外，它与微机电系统 (MEMS) 制造工艺的兼容性表明了 MEMS 谐振设备隔振的应用。测量的传输图显示了 -30 dB 的衰减水平，这与数值预测非常吻合。所提出的设计为 MEMS 谐振器隔振应用的开发开辟了新的视角。 [2020-0069]。