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Characterization of a Probe Test System With Micro-Magnetorheological Flexible Loading
IEEE Transactions on Components, Packaging and Manufacturing Technology ( IF 2.3 ) Pub Date : 2020-09-09 , DOI: 10.1109/tcpmt.2020.3023002
Yixin Liu , Jinqing Xiao , Junhui Li

In order to control the impact behavior of the microprobe test process in microelectronics final test, based on the rapid response and intelligent controllability of magnetorheological (MR) fluid, a novel micro-MR flexible loader was designed to be loaded into the microprobe test system. The results show that the new system can effectively achieve smooth loading, and over-loading could be avoided by adjusting the control current of the loader during large loading displacements. Under different parameters such as loading current, loading speed, and loading displacement, a series of test experiments were carried out and the loaded mechanical response of the probe was collected. Based on statistical analysis on a large amount of experimental data, the law of stable pressure and multiparameter is obtained. Finally, by fitting the data, multiparameter numerical models are obtained. It will provide a numerical basis for the application of the new flexible loading system.

中文翻译:

具有微磁流变柔性载荷的探针测试系统的表征

为了控制微电子最终测试中微探针测试过程的冲击行为,基于磁流变(MR)流体的快速响应和智能可控性,设计了一种新型的微MR柔性加载器以加载到微探针测试系统中。结果表明,该新系统可以有效地实现平稳加载,通过在大位移位移下调节加载器的控制电流,可以避免过载。在不同的参数(例如负载电流,负载速度和负载位移)下,进行了一系列测试实验,并收集了探头的负载机械响应。在对大量实验数据进行统计分析的基础上,得出了稳定的压力和多参数定律。最后,通过拟合数据,获得了多参数数值模型。这将为新的柔性装载系统的应用提供数值依据。
更新日期:2020-10-06
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