In order to control the impact behavior of the microprobe test process in microelectronics final test, based on the rapid response and intelligent controllability of magnetorheological (MR) fluid, a novel micro-MR flexible loader was designed to be loaded into the microprobe test system. The results show that the new system can effectively achieve smooth loading, and over-loading could be avoided by adjusting the control current of the loader during large loading displacements. Under different parameters such as loading current, loading speed, and loading displacement, a series of test experiments were carried out and the loaded mechanical response of the probe was collected. Based on statistical analysis on a large amount of experimental data, the law of stable pressure and multiparameter is obtained. Finally, by fitting the data, multiparameter numerical models are obtained. It will provide a numerical basis for the application of the new flexible loading system.

中文翻译：

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具有微磁流变柔性载荷的探针测试系统的表征

为了控制微电子最终测试中微探针测试过程的冲击行为，基于磁流变（MR）流体的快速响应和智能可控性，设计了一种新型的微MR柔性加载器以加载到微探针测试系统中。结果表明，该新系统可以有效地实现平稳加载，通过在大位移位移下调节加载器的控制电流，可以避免过载。在不同的参数（例如负载电流，负载速度和负载位移）下，进行了一系列测试实验，并收集了探头的负载机械响应。在对大量实验数据进行统计分析的基础上，得出了稳定的压力和多参数定律。最后，通过拟合数据，获得了多参数数值模型。这将为新的柔性装载系统的应用提供数值依据。