Abstract The chemical and phase compositions and structure of the Fe-N-O films produced by reactive dc magnetron sputtering (in Ar or Ar+N2 gas mixture atmospheres) under different conditions (energy parameters of magnetron, residual pressure in the magnetron chamber after preliminary pumping, operating pressure in gas mixture) have been investigated by energy-dispersive X-ray spectroscopy, X-ray diffraction analysis, and vibrating sample magnetometry. Impurity of nitrogen and oxygen, which are present in the sputtered films, participate in the formation of their phase composition and determine its features. Some phenomena inherent in the nanocrystalline films in the metastable state were found. These are the formation of supersaturated bcc interstitial αFe-based solid solution and precipitation of α’ nitrous martensite with bct crystal lattice. The magnetic structure of the Fe-N-O films, which is characterized by the existence of stochastic domains discovered by correlation magnetometry method, is discussed in terms of the random anisotropy model. It was found that two modes of the magnetic anisotropy field of stochastic domains are formed, which determine the existence of two modes of the coercive field found in the magnetic hysteresis loops.

中文翻译：

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纳米晶铁磁 Fe-NO 薄膜的相组成和磁结构

摘要 不同条件下（磁控管能量参数、磁控管腔内残余压力、预抽真空后）反应直流磁控溅射（在Ar或Ar+N2混合气体气氛中）制备的Fe-NO薄膜的化学和相组成和结构。气体混合物中的操作压力）已通过能量色散 X 射线光谱、X 射线衍射分析和振动样品磁强计进行了研究。溅射薄膜中存在的氮和氧杂质参与其相组成的形成并决定其特征。发现了亚稳态纳米晶薄膜中固有的一些现象。这些是过饱和 bcc 间隙 αFe 基固溶体的形成和具有 bct 晶格的 α' 亚硝酸马氏体的沉淀。Fe-NO 薄膜的磁性结构以相关磁力法发现的随机畴的存在为特征，从随机各向异性模型的角度进行了讨论。发现随机畴的磁各向异性场的两种模式形成，这决定了磁滞回线中发现的矫顽场的两种模式的存在。