Since the discovery of the electron, the accurate detection of electrical charges has been a dream of the scientific community. Owing to some remarkable advantages, micro/nanoelectromechanical system-based resonators have been used to design electrometers with excellent sensitivity and resolution. Here, we demonstrate a novel ultrasensitive charge detection method utilizing nonlinear coupling in two micromechanical resonators. We achieve single-electron charge detection with a high resolution up to 0.197 ± 0.056 \({\mathrm{e}}/\sqrt {{\mathrm{Hz}}}\) at room temperature. Our findings provide a simple strategy for measuring electron charges with extreme accuracy.

自从发现电子以来，准确检测电荷一直是科学界的梦想。由于一些显着的优势，基于微/纳机电系统的谐振器已被用于设计具有优异灵敏度和分辨率的静电计。在这里，我们展示了一种利用两个微机械谐振器中的非线性耦合的新型超灵敏电荷检测方法。我们在室温下实现了单电子电荷检测，分辨率高达 0.197 ± 0.056 \({\mathrm{e}}/\sqrt {{\mathrm{Hz}}}\)。我们的发现提供了一种极其精确地测量电子电荷的简单策略。