This paper reports doubly clamped microchannel embedded resonators with two independent and parallel channels integrated for effective sample density tuning for the first time. With the aid of such a unique design, each fluidic channel can be independently accessed thus different liquid samples can be loaded simultaneously. The proposed fluidic resonators are batch fabricated by depositing silicon nitride, polysilicon, and silicon nitride sequentially on top of a set of 4-inch silicon wafers and sacrificing the middle polysilicon layer with potassium hydroxide (KOH). The sacrificial process defines two parallel channels and releases doubly clamped beam resonators simultaneously. In addition, an off-chip vacuum clamp with optical and fluidic access is custom-made to operate each resonator with enhanced quality factor. The microfluidic resonators mounted on the custom vacuum clamp are thoroughly characterized with a laser Doppler vibrometer and used to measure the effective sample density ranging from 395 to 998 kg/m3.

中文翻译：

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具有两个平行通道的微流体谐振器，可独立加载样品并进行有效的密度调节

本文首次报道了具有两个独立和并行通道集成的双钳位微通道嵌入式谐振器，这是首次实现有效的样品密度调节。借助这种独特的设计，每个流体通道都可以独立进入，因此可以同时加载不同的液体样品。所提出的流体谐振器是通过依次在一组4英寸硅晶片的顶部上依次沉积氮化硅，多晶硅和氮化硅，并用氢氧化钾（KOH）牺牲中间的多晶硅层而批量制造的。牺牲过程定义了两个平行的通道，并同时释放出双重钳位的光束谐振器。另外，定制的带光学和流体通道的片外真空夹具可提高每个谐振器的品质因数。