Nanoscale characterization techniques are fundamental to continue increasing the performance and miniaturization of consumer electronics. Among all the available techniques, Kelvin-probe force microscopy (KPFM) provides nanoscale maps of the local work function, a paramount property related to many chemical and physical surface phenomena. For this reason, this technique has being extremely employed in the semiconductor industry, and now is becoming more and more important in the growing field of 2D materials, providing information about the electronic properties, the number of layers, and even the morphology of the samples. However, although all the collective efforts from the community, proper calibration of the technique to obtain reliable and consistent work-function values is still challenging. Here we show a calibration method that improves on current procedures by reducing the uncertainty. In particular, it allows grading probes more easily, thus being a tool to calibrate ...

中文翻译：

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使用Pt涂层探针对2D材料进行校准的Kelvin探针力显微镜

纳米级表征技术对于继续提高消费类电子产品的性能和小型化至关重要。在所有可用的技术中，开尔文探针力显微镜（KPFM）提供了局部功函数的纳米级图，这是与许多化学和物理表面现象有关的最重要的特性。因此，该技术已在半导体行业中得到了极大的应用，并且在2D材料的不断发展的领域中正变得越来越重要，它提供有关电子特性，层数甚至样品形态的信息。但是，尽管所有这些都是社区的共同努力，但对技术进行正确的校准以获取可靠且一致的工作功能值仍然具有挑战性。在这里，我们展示了一种通过减少不确定性来改进当前程序的校准方法。特别是，它允许更轻松地对探针进行分级，从而成为校准仪器的工具。