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Reliable estimation of Raman shift and its uncertainty for a non‐doped Si substrate (NMIJ CRM 5606‐a)
Journal of Raman Spectroscopy ( IF 2.4 ) Pub Date : 2020-10-01 , DOI: 10.1002/jrs.6003 Nobuyasu Itoh 1 , Katsuhiro Shirono 1
Journal of Raman Spectroscopy ( IF 2.4 ) Pub Date : 2020-10-01 , DOI: 10.1002/jrs.6003 Nobuyasu Itoh 1 , Katsuhiro Shirono 1
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Raman shift is one of the most important parameters in Raman spectroscopy and is theoretically calculated from the difference in the wavenumbers of excitation and Raman scattering. At present, there are no standard procedures available to reliably estimate the Raman shift and evaluate its uncertainty from experimental results. In this study, we reliably estimated the Raman shift and evaluated its uncertainty for a non‐doped crystalline Si substrate (NMIJ CRM5606‐a) using a He‐Ne laser and its plasma lines (Ne emission lines). The Raman scattering wavenumber of NMIJ CRM 5606‐a was estimated by the bracket calibration method using the wavenumbers of the closest Ne emission lines. The Raman shift was determined from the differences in the theoretical wavenumbers of a He‐Ne laser and the observed Raman scattering. To evaluate the combined standard uncertainty, we considered the uncertainty originating from the He‐Ne laser and the Ne emission lines, the repeatability of experimental results, inhomogeneity of measuring points and spectral dispersion. The estimated Raman shift was 520.45 cm−1 ± 0.28 cm−1 (coverage factor k = 2). The Raman shift was validated by the other estimated Raman shifts obtained with other two Raman spectrometers.
中文翻译：
非掺杂硅衬底的拉曼位移及其不确定性的可靠估计（NMIJ CRM 5606-a）
拉曼位移是拉曼光谱中最重要的参数之一，理论上是根据激发和拉曼散射波数的差异计算得出的。目前，尚无标准程序可用来可靠地估计拉曼位移并从实验结果评估其不确定性。在这项研究中，我们使用He-Ne激光器及其等离子线（Ne发射线）可靠地估计了拉曼位移并评估了非掺杂晶体Si衬底（NMIJ CRM5606-a）的不确定性。NMIJ CRM 5606-a的拉曼散射波数是使用最接近的Ne发射线的波数通过括号校正法估算的。拉曼位移是根据氦氖激光器的理论波数与观察到的拉曼散射的差异确定的。为了评估组合的标准不确定度，我们考虑了源自氦氖激光和氖发射谱线的不确定度，实验结果的可重复性，测量点的不均匀性和光谱色散。拉曼位移估计为520.45厘米-1 ±0.28 cm -1（覆盖系数k = 2）。拉曼位移通过使用其他两个拉曼光谱仪获得的其他估计拉曼位移进行验证。
更新日期：2020-12-10
中文翻译：
非掺杂硅衬底的拉曼位移及其不确定性的可靠估计（NMIJ CRM 5606-a）
拉曼位移是拉曼光谱中最重要的参数之一，理论上是根据激发和拉曼散射波数的差异计算得出的。目前，尚无标准程序可用来可靠地估计拉曼位移并从实验结果评估其不确定性。在这项研究中，我们使用He-Ne激光器及其等离子线（Ne发射线）可靠地估计了拉曼位移并评估了非掺杂晶体Si衬底（NMIJ CRM5606-a）的不确定性。NMIJ CRM 5606-a的拉曼散射波数是使用最接近的Ne发射线的波数通过括号校正法估算的。拉曼位移是根据氦氖激光器的理论波数与观察到的拉曼散射的差异确定的。为了评估组合的标准不确定度，我们考虑了源自氦氖激光和氖发射谱线的不确定度，实验结果的可重复性，测量点的不均匀性和光谱色散。拉曼位移估计为520.45厘米-1 ±0.28 cm -1（覆盖系数k = 2）。拉曼位移通过使用其他两个拉曼光谱仪获得的其他估计拉曼位移进行验证。
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