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Novel laser micro-texturing on silicon with liquid lenses by breath figure method
Microsystem Technologies ( IF 1.6 ) Pub Date : 2020-10-01 , DOI: 10.1007/s00542-020-05042-x
Yuan-Jen Chang , Yong-Xiang Chang

Surface texturing is a way of managing the surface properties of a material. This paper adopts a novel approach to laser texturing by using it in conjunction with liquid glycerin lenses and a polymer template. Such a process can effectively be used to produce micro- or even nano-scale textures on complex three-dimensional surfaces. A polymer film with an array of glycerin–water-mixed droplets proved economical and easy to produce. The resulting liquid lenses were penetrated by a nanosecond pulsed Nd:YAG laser. As the laser beam passed through the liquid lens array, it was refocused and converted to multiple beams that all engineered the substrate surface. The surface was thus successfully textured. The adaptation laser texturing technology shows potential for the application of textures to complex three-dimensional objects. In this study, a large area of microscale surface texturing on a silicon substrate was demonstrated; the texturing size lay between 1 and 3 μm, and the depth of the texturing was around 20 nm.



中文翻译:

通过呼吸图法在液体透镜上对硅进行新型激光微纹理化

表面纹理化是管理材料表面特性的一种方式。本文将其与液体甘油透镜和聚合物模板结合使用,采用了一种新颖的激光纹理化方法。这样的过程可以有效地用于在复杂的三维表面上产生微米甚至纳米级的纹理。带有甘油和水混合液滴的聚合物薄膜被证明是经济且易于生产的。所得液体透镜被纳秒脉冲Nd:YAG激光穿透。当激光束穿过液体透镜阵列时,它被重新聚焦并转换为全部对基板表面进行工程处理的多束光束。因此,表面成功地被纹理化。自适应激光纹理化技术显示出将纹理应用于复杂的三维对象的潜力。在这个研究中,证实了在硅衬底上大面积的微观表面纹理化;织构化尺寸在1-3μm之间,织构化深度约为20 nm。

更新日期:2020-10-02
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