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Study on the rheological properties and polishing properties of SiO 2 @CI composite particle for sapphire wafer
Smart Materials and Structures ( IF 3.7 ) Pub Date : 2020-09-29 , DOI: 10.1088/1361-665x/abb21c
Jisheng Pan , Zhijun Chen , Qiusheng Yan

To study the rheological properties and polishing performance of magnetorheological fluids (MRFs) prepared with SiO 2 @carbonyl iron (CI) core-shell particles, SiO 2 @CI core-shell particles with different shell thicknesses were synthesized by an improved Stöber method controlling the amount of tetraethyl orthosilicate (TEOS). Then, four types of MRFs which dispersed with core-shell particles with thin shells, core-shell particles with thick shells, SiO 2 particles, or carbonyl iron were prepared for sapphire polishing. The results show that the rheological properties of MRF based on thicker shell SiO 2 @CI are enhanced compared to those of MRFs prepared by dispersing abrasive and CI. Comparing with other MRFs, sapphire can obtain better surface quality when using thicker shell SiO 2 @CI. The MRF fabricated by SiO 2 @CI core-shell particles can increase the contact area between the abrasive and the workpiece and enhance the ...

中文翻译:

蓝宝石晶片用SiO 2 @CI复合颗粒的流变性能和抛光性能的研究

为了研究由SiO 2 @羰基铁(CI)核壳颗粒制备的磁流变液(MRF)的流变性能和抛光性能,通过改进的Stöber方法控制了SiO 2 @羰基铁壳颗粒的合成,合成了具有不同壳厚度的SiO 2 @CI核壳颗粒。量的原硅酸四乙酯(TEOS)。然后,制备蓝宝石抛光的四种类型的MRF,其分散有具有薄壳的核壳颗粒,具有厚壳的核壳颗粒,SiO 2颗粒或羰基铁。结果表明,与通过分散磨料和CI制备的MRF相比,基于较厚壳SiO 2 @CI的MRF的流变性能得到了增强。与其他MRF相比,使用较厚的SiO 2 @CI外壳时,蓝宝石可以获得更好的表面质量。
更新日期:2020-09-30
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