This paper presents the design and implementation of a robust H-infinity controller on two novel MEMS force sensors. The novel microelectromechanical system (MEMS) sensors incorporated a mechanism that permits tuning of the device’s mechanical stiffness and has been used for the characterization of micro-cantilever and biological tissues. To ensure stability and guaranteed performances, certain specifications such as error tracking, command moderation, disturbance rejection, and robustness in presence of uncertainties, were made and the H-infinity control technique was employed to synthesize robust controllers for the two force sensors. Finally, this robust controller, integral, and PID controllers were implemented on the real systems and their performance in closed-loop were compared.

本文介绍了在两个新型 MEMS 力传感器上的鲁棒 H 无穷大控制器的设计和实现。新型微机电系统 (MEMS) 传感器结合了一种机制，可以调整设备的机械刚度，并已用于微悬臂梁和生物组织的表征。为确保稳定性和性能保证，制定了某些规范，例如错误跟踪、命令调节、干扰抑制和存在不确定性时的鲁棒性，并采用 H 无穷大控制技术来合成两个力传感器的鲁棒控制器。最后，在实际系统上实现了这种鲁棒控制器、积分控制器和 PID 控制器，并比较了它们在闭环中的性能。