Abstract This paper proposed a method of analyzing the measurement accuracy of a laser tracing system using the deviation of the incident beam from the center of a cat's eye retro-reflector. Based on the laser tracing system's measurement principle, a corresponding model is established to analyze the influence of the incident beam deviation from the center of cat's eye retro-reflector at the initial measurement position on the measurement accuracy. The measurement experiments verified that the influence was significant. When the deviation between the incident beam and the center of the cat's eye retro-reflector was -50 μm, the displacement measurement error was 3.5867 ± 0.0260 μm. When the deviation was 50 μm, the displacement measurement error reached 3.5939 ± 0.0189 μm. The relative displacement error between the cat's eye retro-reflector and the laser tracing system decreased the measurement system's accuracy. This study provides an important theoretical basis for evaluating and improving the accuracy and reliability of laser tracing measurement systems.

中文翻译：

---

入射光束偏离猫眼反射镜中心对激光跟踪系统测量精度的影响

摘要 本文提出了一种利用入射光束与猫眼后向反射器中心的偏差来分析激光跟踪系统测量精度的方法。基于激光跟踪系统的测量原理，建立了相应的模型，分析了初始测量位置处入射光束偏离猫眼反射器中心对测量精度的影响。测量实验证实影响显着。当入射光束与猫眼反射镜中心的偏差为-50 μm时，位移测量误差为3.5867±0.0260 μm。当偏差为 50 μm 时，位移测量误差达到 3.5939 ± 0.0189 μm。cat'之间的相对位移误差 眼睛后向反射器和激光跟踪系统降低了测量系统的准确性。该研究为评估和提高激光跟踪测量系统的精度和可靠性提供了重要的理论依据。