Activation reactions of molecules in plasma are investigated using plasma polymerization of hexamethyldisiloxane as a model system for plasma‐state polymerization. Underlying reaction pathways and film‐forming mechanisms are revisited based on a simplified macroscopic approach, considering the average energy available per monomer particle, E_pl, in relation to the threshold energy, E_th, which represents an activation barrier for plasma polymerization. Basic principles are discussed involving averaged values for collision frequency, cross‐section, and reaction rate to produce film‐forming species combining macroscopic and microscopic quantities. Considering the energy uptake from the electric field by the electrons, the energy transfer from electrons to monomer molecules, and the conversion into film‐forming species, it is demonstrated that E_pl/E_th is equally relevant as the electron energy distribution function for plasma‐chemical activation reactions.

中文翻译：

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六甲基二硅氧烷的等离子体聚合：再探讨

使用六甲基二硅氧烷的等离子体聚合作为等离子体状态聚合的模型系统，研究了血浆中分子的活化反应。基于简化的宏观方法，重新考虑了基础反应路径和成膜机理，其中考虑了每个单体粒子的平均可用能量E _pl与阈值能量E _{th的关系。}，代表了等离子体聚合的激活屏障。讨论了基本原理，涉及碰撞频率，横截面和反应速率的平均值，以结合宏观和微观数量来生产成膜物质。考虑到电子从电场吸收的能量，从电子到单体分子的能量转移以及成膜物质的转化，证明了E _pl / E _th与等离子体的电子能量分布函数同等重要化学活化反应。