Electrical measurement of nano-scale devices and structures requires skills and hardware to make nano-contacts. Such measurements have been difficult for number of laboratories due to cost of probe station and nano-probes. In the present work, we have demonstrated possibility of assembling low cost probe station using USB microscope (US $ 30) coupled with in-house developed probe station. We have explored the effect of shape of etching electrodes on the geometry of the microprobes developed. The variation in the geometry of copper wire electrode is observed to affect the probe length ##IMG## [http://ej.iop.org/images/2632-959X/1/2/020042/nanoxabb6c4ieqn1.gif] {$(0.58\,{\rm{mm}}\,{\rm{to}}\,2.15\,{\rm{mm}})$} and its half cone angle (1.4° to 8.8˚). These developed probes were used to make contact on micro patterned metal films and was used for electrical measurement along with semiconductor parameter analyzer. These probes show low contact resistance (~4 Ω) ...

中文翻译：

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使用蚀刻钨纳米探针的低成本电探针台：阴极几何形状的作用

纳米级设备和结构的电学测量需要技能和硬件来进行纳米接触。由于探针台和纳米探针的成本，这样的测量对于许多实验室来说是困难的。在当前的工作中，我们证明了使用USB显微镜（30美元）和内部开发的探针台组装低成本探针台的可能性。我们已经探索了蚀刻电极的形状对所开发的微探针的几何形状的影响。观察到铜线电极几何形状的变化会影响探针的长度## IMG ## [http://ej.iop.org/images/2632-959X/1/2/020042/nanoxabb6c4ieqn1.gif] {$ （0.58 \，{\ rm {mm}} \，{\ rm {to}} \，2.15 \，{\ rm {mm}}）$}及其半锥角（1.4°至8.8˚）。这些开发的探头用于与微图案化金属膜接触，并与半导体参数分析仪一起用于电学测量。这些探针显示低接触电阻（〜4Ω）...