PLZT (lanthanum-doped lead zirconate titanate) ceramic has obtained widespread applications in the engineering fields. Especially, it has broad application prospects in driving field. In this article, aiming at the proposed opto-electrostatic hybrid driving torsion actuator, the influence of different factors on driving voltage and output deformation is analyzed and verified by a new mathematical model and a variety of experiments. According to the analysis and experimental results, different PLZT ceramics with different sizes can produce different driving voltage and deformation of the actuator. And as the length of the torsion beam increases or the width of the torsion beam decreases, the deformation increases while the driving voltage remains the same. The driving performance is better when the copper foil attached to the right end of the upper electrode. Moreover, when the area of copper foil decreases or the distance between electrodes increases, the driving voltage increases while the change of deformation is determined by driving voltage, area and distance between electrodes. Therefore, the analysis of the influence factors can not only explore their influence on driving performance, but also provide a theoretical basis for the practical application of opto-electrostatic hybrid driving torsion actuator based on PLZT ceramic.

PLZT（掺镧锆钛酸铅）陶瓷已在工程领域得到了广泛的应用。特别是在驱动领域具有广阔的应用前景。在本文中，针对提出的光静电混合驱动扭转致动器，通过新的数学模型和各种实验分析和验证了不同因素对驱动电压和输出变形的影响。根据分析和实验结果，不同尺寸的不同PLZT陶瓷可以产生不同的驱动电压和致动器变形。并且随着扭力梁的长度增加或扭力梁的宽度减小，变形增加而驱动电压保持不变。当铜箔附着在上电极的右端时，驱动性能更好。此外，当铜箔的面积减小或电极之间的距离增加时，驱动电压增加，而变形的改变由驱动电压，电极之间的面积和距离确定。因此，对影响因素的分析，不仅可以探讨它们对驱动性能的影响，而且可以为基于PLZT陶瓷的光电混合动力驱动扭力致动器的实际应用提供理论依据。