This paper presents a micro electromagnetic vibration energy harvester (VEH) that uses complementary metal-oxide-semiconductorcompatible 3D micro-electromechanical system coils and a ferromagnetic core to improve efficiency and output power. A systematic model is proposed to describe the nonlinear electromagnetic damping coefficient and nonlinear attraction between the magnet and the ferromagnetic core. The nonlinear model agrees well with the finite element calculation results. Then, a vibration model is established by considering nonlinear stiffness and damping coefficient to obtain the dynamic characteristics and output performance of the system. Furthermore, a numerical method is conducted to systematically investigate the influence of air gap and initial magnet offset under different excitation amplitudes. The simulation results indicate that with a smaller air gap, the output power is higher. Moreover, there is an optimal initial magnet offset in relation to the air gap to...

中文翻译：

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基于3D MEMS线圈的具有非线性阻尼和刚度的电磁振动能量采集器的理论模型与分析

本文介绍了一种微电磁振动能量收集器（VEH），它使用互补的金属氧化物半导体兼容3D微机电系统线圈和铁磁芯来提高效率和输出功率。提出了一个系统模型来描述磁体与铁磁芯之间的非线性电磁阻尼系数和非线性吸引力。非线性模型与有限元计算结果非常吻合。然后，通过考虑非线性刚度和阻尼系数建立振动模型，以获得系统的动态特性和输出性能。此外，采用数值方法来系统地研究气隙和初始磁体偏移在不同激励幅度下的影响。仿真结果表明，气隙越小，输出功率越高。此外，相对于气隙而言，存在最佳的初始磁体偏移量，以...