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Angular dependence of secondary electron yield from microporous gold surfaces
Journal of Vacuum Science & Technology B ( IF 1.5 ) Pub Date : 2020-09-01 , DOI: 10.1116/6.0000346
Jonathan Ludwick 1 , Asif Iqbal 2 , Daniel Gortat 3 , John D. Cook 3 , Marc Cahay 1 , Peng Zhang 2 , Tyson C. Back 4 , Steven Fairchild 4 , Martin Sparkes 3 , William O’Neill 3
Affiliation  

We report exhaustive measurements of the secondary electron yield (SEY) from a gold film containing an array of micropores as a function of the angle of incidence of the primary electrons. The SEY measurements are in good agreement with Monte-Carlo (MC) simulations. A highly accurate empirical fit to the SEY data as a function of the incident electron impact angle is also proposed. In this study, the micropores have aspect ratios (ratio of pore height over pore diameter) ranging from about 1.5 to 3.5. The effect of the pore array density (porosity) and pore aspect ratio is analyzed in greater detail. It is found that increasing the pore aspect ratio and porosity leads to a sharp reduction in the total SEY in agreement with MC simulations.

中文翻译:

微孔金表面二次电子产率的角度依赖性

我们报告了对包含微孔阵列的金膜二次电子产率 (SEY) 的详尽测量,作为一次电子入射角的函数。SEY 测量与蒙特卡罗 (MC) 模拟非常吻合。还提出了对 SEY 数据的高精度经验拟合,作为入射电子撞击角的函数。在这项研究中,微孔的纵横比(孔高度与孔径之比)范围从大约 1.5 到 3.5。更详细地分析了孔阵列密度(孔隙率)和孔纵横比的影响。发现增加孔隙纵横比和孔隙率导致总 SEY 急剧减少,这与 MC 模拟一致。
更新日期:2020-09-01
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