Abstract On-line optical monitoring of multilayer coating production requires solving inverse identification problems of determining the thicknesses of coating layers. Regardless of the algorithm used to solve inverse problems, the errors in the thicknesses of the deposited layers are correlated by the monitoring procedure. Studying the correlation of thickness errors is important for the production of the most complex optical coatings. We develop a general geometric approach to study this correlation. It is based on a statistical analysis of large numbers of error vectors obtained during computational experiments on optical coating production. The application of the proposed approach is demonstrated using computational manufacturing experiments on the production of a 50-layer filter with four different monitoring strategies. A special coefficient is introduced to evaluate the strength of the error correlation effect. The results obtained confirm that the introduced parameter can be used as a measure of the strength of the correlation effect in practical applications.

中文翻译：

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光学镀膜监测反问题误差的相关性

摘要 多层涂层生产的在线光学监测需要解决确定涂层厚度的逆识别问题。不管用于解决逆问题的算法如何，沉积层厚度的误差都与监控程序相关。研究厚度误差的相关性对于生产最复杂的光学涂层很重要。我们开发了一种通用的几何方法来研究这种相关性。它基于对光学镀膜生产计算实验中获得的大量误差向量的统计分析。使用计算制造实验证明了所提出方法的应用，该实验用于生产具有四种不同监控策略的 50 层过滤器。引入了一个特殊的系数来评估误差相关效应的强度。获得的结果证实，引入的参数可以用作实际应用中相关效应强度的度量。