For the construction of the Inner Tracker (ITk) as part of the phase-II upgrade programme of the ATLAS detector for the High-Luminosity (HL) LHC, batches of Long Strip (LS) and Short Strip (SS) n${}^{+}$-in-p type micro-strip sensors have been produced by Hamamatsu Photonics and Infineon.

The full size sensors measure approximately 98 $\times$ 98 mm² and are designed and engineered for tolerance against the 9.7 $\times$ 10¹⁴ 1 MeV n_eq/cm² fluence expected at the HL-LHC, including a safety factor of 1.5. Each sensor has 2 or 4 columns of 1280 individual channels arranged at 75.5 $\mathrm{\mu }$m horizontal pitch.

To ensure the sensors comply with their specifications, a Quality Control (QC) procedure has been implemented, comprising measurements on every individual sensor as well as on a sample basis. Every sensor is subjected to an initial visual inspection, after which the full surface of the sensor is captured with very high resolution by an automated camera setup. Non-contact metrology is performed to obtain the sensor surface profile. Electrical measurements establishing the reverse bias leakage current and depletion voltage are then conducted automatically. Sample sensors from every batch are subjected to 40 h of leakage stability checks in controlled atmosphere, and tests on every channel measuring leakage current, coupling capacitance and bias resistance are done. The recorded results are uploaded to a production database following data quality checks.

In this paper, QC test validation data and the compiled results for the first batches of production grade sensors are presented. The QC protocol was validated, and the first production sensors were confirmed to be within specification. The results are compared to those from the previous generation of prototype sensors.

用于构造内部跟踪器（ITk），作为高光度（HL）LHC的ATLAS检测器II阶段升级计划的一部分，包括长条（LS）和短条（SS）n${}^{+}$Hamamatsu Photonics和Infineon生产了in-p型微带传感器。

全尺寸传感器的尺寸约为98 $\times$98 mm ²并经设计可承受9.7的公差$\times$HL-LHC的预期通量为10 ¹⁴ 1 MeV n _eq / cm ²，安全系数为1.5。每个传感器有2列或4列，每列1280个独立通道，排列为75.5$\mathrm{\mu }$米水平间距。

为确保传感器符合其规格，已实施了质量控制（QC）程序，包括对每个单独传感器以及样品的测量。每个传感器都要进行初步的目视检查，然后通过自动摄像头设置以非常高分辨率捕获传感器的整个表面。执行非接触式计量以获得传感器表面轮廓。然后自动进行建立反向偏置泄漏电流和耗尽电压的电气测量。每批样品传感器均在受控气氛下进行40小时的泄漏稳定性检查，并在每个测量泄漏电流，耦合电容和偏置电阻的通道上进行测试。

本文介绍了首批生产级传感器的质量控制测试验证数据和汇总结果。通过了QC协议验证，并确认了首批生产传感器在规格范围内。将结果与上一代原型传感器的结果进行比较。