As the demand for flexible devices has increased, polymers have become very promising materials for these applications because they have excellent flexibility, lightweight, and low cost. Vacuum kinetic spraying can be a good alternative technology for film fabrication on polymers as dense ceramic films can be fabricated even at room temperature without thermal degradation of the polymer substrate. However, there is a lack of understanding of the deposition process of ceramic films on a polymer substrate. In this regard, the deposition behavior and microstructural features were investigated by comparing Al2O3 particle deposition on glass and polycarbonate (PC) substrates by using simulations and experimental methods. Simulations demonstrated that hard particles were prone to penetrate or be only embedded in the soft substrate without sufficient fragmentation. This is attributed to the shock absorption effect of the substrate. Particle kinetic energy was transferred mostly to the internal energy of the soft substrate but not to particle internal energy (plasticity and/or failure), which prevents particle fragmentation. Consequently, unusual interface microstructural feature was attributed to insufficient particle fragmentation by the shock absorption of the soft substrate.

中文翻译：

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聚碳酸酯基体真空动力学喷涂Al2O3薄膜对颗粒破碎和微观结构特征的吸震效应

随着对柔性设备需求的增加，聚合物已成为这些应用中非常有前途的材料，因为它们具有出色的柔韧性、重量轻和成本低。真空动力喷涂可以成为在聚合物上制造薄膜的良好替代技术，因为即使在室温下也可以制造致密的陶瓷薄膜，而聚合物基材不会发生热降解。然而，人们对陶瓷薄膜在聚合物基板上的沉积过程缺乏了解。在这方面，通过使用模拟和实验方法比较玻璃和聚碳酸酯 (PC) 基板上的 Al2O3 颗粒沉积，研究了沉积行为和微观结构特征。模拟表明，硬颗粒易于穿透或仅嵌入软基材中而没有足够的碎裂。这归因于基材的减震效果。粒子动能主要转移到软基底的内能，而不是转移到粒子内能（塑性和/或失效），这可以防止粒子破碎。因此，不寻常的界面微观结构特征归因于软基材的冲击吸收导致的颗粒破碎不足。