Love mode surface acoustic wave (SAW) devices are very useful for sensing in liquid environments. Earlier work on such devices mainly made use of zinc oxide (ZnO) thin films on silicon (Si) or silicon dioxide ( ##IMG## [http://ej.iop.org/images/0268-1242/35/11/115007/sstabadbbieqn1.gif] {${\text{Si}}{{\text{O}}_2}$} ). However, using them for sensing still required protection from contamination from zinc (Zn) in the form of some additional passivation layer. In this work, the objective has been to study an aluminium nitride (AlN)-based multilayer structure that is able to generate SAW Love modes very efficiently. A layer of ##IMG## [http://ej.iop.org/images/0268-1242/35/11/115007/sstabadbbieqn2.gif] {${\text{Si}}{{\text{O}}_2}$} on top of the AlN layer does the trick. A 3D finite element method simulation analysis of the proposed structure ( ##IMG## {${\text{Si}}{{\text{O}}_2}/{\text{AlN}}\left( {11\bar 20} \right)/{\text{...}

中文翻译：

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用于Love模式声表面波器件的基于氮化铝的多层结构

Love模式表面声波（SAW）设备对于在液体环境中进行传感非常有用。此类设备的早期工作主要是利用硅（Si）或二氧化硅上的氧化锌（ZnO）薄膜（## IMG ## [http://ej.iop.org/images/0268-1242/35/11 /115007/sstabadbbieqn1.gif] {$ {\ text {Si}} {{\ text {O}} _ 2} $}）。然而，将它们用于感测仍然需要防止一些附加钝化层形式的锌（Zn）污染的保护。在这项工作中，目标是研究能够非常有效地生成SAW Love模式的基于氮化铝（AlN）的多层结构。## IMG ##层[http://ej.iop.org/images/0268-1242/35/11/115007/sstabadbbieqn2.gif] {$ {\ text {Si}} {{\ text {O在AlN层顶部的}} _ 2} $}可以解决问题。