In this paper, an electronegative magnetized plasma sheath model with non-extensive electron distribution is established, and the Bohm criterion affected by the non-extensive parameter q is theoretically derived. The ion Mach number varies with q . The numerical simulation results show that compared with electronegative magnetized plasma sheath with Maxwell distribution ( q = 1), the sheath structures with super-extensive distribution ( q < 1) and sub-extensive distribution ( q > 1) are different. The physical quantities including the sheath potential distribution, ion density distribution, the electron density distribution, negative ion density distribution and the net space charge density distribution are discussed. It is shown that the non-extensive parameter q has a significant influence on the structure of the electronegative magnetized plasma sheath. Due to the Lorentz force, both the magnitude and the angle of the magnetic field...

中文翻译：

---

具有非广泛电子分布的负电磁化等离子体鞘的结构

本文建立了具有非扩展电子分布的负电磁化等离子体鞘层模型，并从理论上推导了受非扩展参数q影响的Bohm准则。离子马赫数随q变化。数值模拟结果表明，与具有Maxwell分布（q = 1）的负电磁化等离子体鞘相比，具有超扩展分布（q <1）和亚扩展分布（q> 1）的鞘结构是不同的。讨论了包括鞘层势分布，离子密度分布，电子密度分布，负离子密度分布和净空间电荷密度分布在内的物理量。结果表明，非扩展参数q对负电磁化等离子体鞘层的结构有重要影响。由于洛伦兹力，磁场的大小和角度...