One advantage of a femtosecond laser is that it enables the processing of materials that are otherwise difficult to process via conventional methods such as cutting, grinding, electric discharge machining, etc. However, it is difficult to predict a three dimensional shape processed by the laser. To achieve required three-dimensional shapes using femtosecond lasers with high accuracy and efficiency, it is essential to develop a computer-aided manufacturing (CAM) system that generates processing data (NC data). In this paper, a simulation method is proposed for femtosecond laser processing, which is the basis for the development of a CAM system. A binderless nano-polycrystalline diamond is used as the workpiece material to test the proposed method. Based on a comparison with the experimental results, it is confirmed that the processing shape could be simulated at a high accuracy for fixed-point irradiation as well as scanning irradiation.

飞秒激光的一个优点是，它能够处理原本难以通过常规方法（例如切割，研磨，放电加工等）处理的材料。但是，很难预测由激光处理的三维形状。为了使用飞秒激光以高精度和高效率获得所需的三维形状，必须开发一种可生成处理数据（NC数据）的计算机辅助制造（CAM）系统。本文提出了一种飞秒激光加工的仿真方法，这是开发CAM系统的基础。使用无粘合剂的纳米多晶金刚石作为工件材料来测试所提出的方法。根据与实验结果的比较，