Abstract This paper presents acceleration self-compensation mechanism and experimental research on shock wave piezoelectric pressure sensor, in order to eliminate the parasitic effect of acceleration on pressure measurement. Firstly, the demand analysis of the pressure sensor during the dynamic measurement of the explosion pressure field is completed. Aiming at the phenomenon of acceleration parasitic effect of piezoelectric pressure sensor, a structure of novel measurement crystal with acceleration compensation principle is proposed, and the mechanism of acceleration compensation is studied. The theoretical calculation formula of the piezoelectric sensor's acceleration sensitivity is derived, and the shock wave piezoelectric pressure sensor with acceleration compensation is designed. Two kinds of finite element simulation structural models without acceleration compensation and with acceleration compensation are established to compare their measurement performances. Structural optimization design of piezoelectric pressure sensor with acceleration compensation is carried out to eliminate the acceleration sensitivity. The calibration experiment of the piezoelectric pressure sensor is completed by building the calibration experiment platform. The experimental results show that the acceleration sensitivity of the sensor is greatly reduced, which are in good agreement with the theoretical derivation and simulation results. The sensor has superior dynamic characteristic, and its natural frequency exceeds 200 kHz. The research content of this paper has important theoretical significance and practical value for reducing the acceleration parasitic effect of piezoelectric pressure sensor.

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激波压电压力传感器加速度自补偿机理及实验研究

摘要 本文介绍了冲击波压电压力传感器的加速度自补偿机理和实验研究，以消除加速度对压力测量的寄生效应。首先完成了爆炸压力场动态测量过程中压力传感器的需求分析。针对压电压力传感器的加速度寄生效应现象，提出了一种具有加速度补偿原理的新型测量晶体结构，并研究了加速度补偿的机理。推导了压电传感器加速度灵敏度的理论计算公式，设计了带加速度补偿的冲击波压电压力传感器。建立了无加速度补偿和有加速度补偿两种有限元仿真结构模型，比较了其测量性能。对带加速度补偿的压电压力传感器进行结构优化设计，消除加速度灵敏度。通过搭建标定实验平台完成压电压力传感器的标定实验。实验结果表明，传感器的加速度灵敏度大大降低，与理论推导和仿真结果吻合较好。该传感器具有优越的动态特性，其固有频率超过200 kHz。