Purpose

This paper aims to present the capacitance characterization of tapered dielectrophoresis (DEP) microelectrodes as micro-electro-mechanical system sensor and actuator device. The application of DEP-on-a-chip (DOC) can be used to evaluate and correlate the capacitive sensing measurement at an actual position and end station of liquid suspended targeted particles by DEP force actuator manipulation.

Design/methodology/approach

The capability of both, sensing and manipulation was analysed based on capacitance changes corresponding to the particle positioning and stationing of the targeted particles at regions of interest. The mechanisms of DEP sensor and actuator, designed in DOC applications were energized by electric field of tapered DEP microelectrodes. The actual DEP forces behaviour has been also studied via quantitative analysis of capacitance measurement value and its correlation with qualitative analysis of positioning and stationing of targeted particles.

Findings

The significance of the present work is the ability of using tapered DEP microelectrodes in a closed mode system to simultaneously sense and vary the magnitude of manipulation.

Originality/value

The integration of DOC platform for contactless electrical-driven with selective detection and rapid manipulation can provide better efficiency in in situ selective biosensors or bio-detection and rapid bio-manipulation for DOC diagnostic and prognostic devices.

中文翻译：

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电容作为锥形微电极阵列中同时进行芯片上电泳应用的同时感应和促动工具的实现

目的

本文旨在介绍作为微机电系统传感器和执行器装置的锥形介电电泳（DEP）微电极的电容特性。DEP-on-a-chip（DOC）的应用可用于通过DEP力执行器操纵来评估和关联液体悬浮目标颗粒的实际位置和末端站处的电容感应测量，并将其相关联。

设计/方法/方法

基于对应于目标位置处目标粒子的粒子定位和定位的电容变化，分析了感应和操纵的能力。在DOC应用中设计的DEP传感器和执行器的机制由锥形DEP微电极的电场激励。还通过对电容测量值进行定量分析及其与目标粒子的定位和定性的定性分析，研究了实际的DEP力行为。

发现

当前工作的意义在于在封闭模式系统中使用锥形DEP微电极同时感应和改变操纵幅度的能力。

创意/价值

用于非接触电驱动的DOC平台与选择性检测和快速操作的集成可以为DOC诊断和预后设备提供原位选择性生物传感器或生物检测和快速生物操作的更高效率。