Mixed beryllium-tungsten-deuterium (Be-W-D) layers (4.4–28.4 at.% W) were codeposited in a magnetron discharge in D 2 -Ar atmosphere at pressures of 0.8 Pa, 2.7 Pa, and 8 Pa and a substrate temperature of 373 ± 15 K. The composition of the layers was determined using nuclear reaction analysis and Rutherford backscattering spectrometry. D trapping states in the layers were examined using thermal desorption spectroscopy. At all pressures used, the D concentration in the layers has a non-monotonic dependence on the W concentration, with the maximum occurring at 4.4–7.3% W. In this case, the D concentration is about two times greater than that in a Be-D layer; in W-D layers the D concentration is more than one order of magnitude smaller. Increase of pressure during deposition results in an increase of the D concentration in Be-D and Be-W-D (4.4–7.3% W) layers and is linked with the appearance of sharp low-temperature D release peaks near 450 K and 500 K. Increase of pressur...

中文翻译：

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混合Be-WD共沉积层中的氘保留

混合铍-钨-氘（Be-WD）层（4.4-28.4 at。％W）共沉积在D 2 -Ar气氛中的磁控管放电中，压力为0.8 Pa，2.7 Pa和8 Pa，衬底温度为373±15K。使用核反应分析和卢瑟福背散射光谱法确定层的组成。使用热解吸光谱法检查层中的D俘获状态。在所有压力下，各层中的D浓度均与W浓度呈非单调依赖性，最大浓度为4.4–7.3％W。在这种情况下，D浓度约为Be中的D浓度的两倍。 -D层; 在WD层中，D浓度要小一个数量级。沉积过程中压力的增加导致Be-D和Be-WD中D浓度的增加（4.4–7。