In this paper, a novel method to fabricate quartz glass electromagnetically actuated ring resonator for gyroscope application is presented. Sacrificial supporting structures were employed for the fabrication. The fabricated device was electromagnetically driven at resonance, with the resonant frequency of 42 KHz. The Q-factor at the atmospheric pressure was about 142. The frequency difference between primary and secondary mode was 681 Hz.

中文翻译：

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使用牺牲支撑结构的石英玻璃环形谐振器的制造方法

本文提出了一种新颖的制造陀螺仪应用石英玻璃电磁致动环形谐振器的方法。牺牲支撑结构被用于制造。所制造的设备以共振方式电磁驱动，共振频率为42 KHz。在大气压下的Q因子约为142。初级和次级模式之间的频率差为681 Hz。