Ultrananocrystalline diamond/hydrogenated amorphous carbon films were synthesized by coaxial arc plasma deposition. The morphological and structural evolutions of the films driven by laser irradiation (ArF, 193 nm, 20 ns) are examined at different laser energies (0.4–1 J cm −2 ). Up on laser irradiation, the films revealed hydrogen effusions accompanied by the transformation of sp 3 into sp 2 -hybridization carbon. However, the film irradiated at 0.8 J cm −2 exhibited higher sp 3 fractions, which can be attributed to that: a specific value of laser energy density (0.8 J cm −2 ) can provide a suitable amount of heating that is enough to quench the film and increase the sp 3 contents.

中文翻译：

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同轴电弧等离子体制备的激光辐照超纳米晶金刚石/非晶碳复合膜的结构演变

通过同轴电弧等离子体沉积合成了超纳米晶金刚石/氢化非晶碳膜。在不同的激光能量（0.4-1 J cm -2）下检查了由激光辐照（ArF，193 nm，20 ns）驱动的薄膜的形态和结构演变。在激光辐照之前，薄膜显示出氢渗出，伴随着sp 3转变为sp 2-杂化碳。但是，以0.8 J cm -2照射的薄膜显示出较高的sp 3分数，这可以归因于：特定的激光能量密度值（0.8 J cm -2）可以提供足以淬火的适当加热量并增加sp 3的含量。