Abstract The aim of the present work was to prepare SiOxCyHz coatings in capacitively-coupled RF glow discharge from gaseous mixture of trimethylsilyl acetate (TMSAc) monomer and oxygen. The properties of deposited coatings have been investigated using several characterization methods. The presented study proves that properties of TMSAc-based thin films are significantly dependent on the monomer ratio in TMSAc/O2 mixture which varied from 25.0% to 92.3%. Using a low TMSAc ratio (high content of oxygen gas) resulted in organosilicon materials similar to SiO2 in terms of chemical composition and mechanical properties. Increasing the fraction of TMSAc in gaseous mixture led to the formation of more organic polymeric structures enriched with carbon atoms bonded in CHx chains. Values of Martens hardness decreased from 3.97 to 0.76 GPa with increasing TMSAc fraction from 25.0% to 92.3%. The degree of hydrophobicity of prepared coatings evolved in accordance with observed structural changes corresponding to applied monomer ratios. The water contact angle gradually increased from 75.0° to 95.3° with increasing TMSAc fraction. The prepared TMSAc plasma polymers became more hydrophobic with more intensive integration of hydrocarbon species into the surface structure.

中文翻译：

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在电容耦合射频辉光放电中由三甲基乙酸甲硅烷酯和氧气沉积有机硅涂层

摘要 本工作的目的是在由三甲基乙酸甲硅烷酯 (TMSAc) 单体和氧气的气态混合物电容耦合射频辉光放电中制备 SiOxCyHz 涂层。已使用多种表征方法研究了沉积涂层的特性。所提出的研究证明，基于 TMSAc 的薄膜的性能显着取决于 TMSAc/O2 混合物中的单体比例，从 25.0% 到 92.3%。使用低 TMSAc 比率（高氧气含量）导致在化学成分和机械性能方面类似于 SiO2 的有机硅材料。增加气态混合物中 TMSAc 的比例导致形成更多有机聚合物结构，该结构富含键合在 CHx 链中的碳原子。马氏硬度值从 3.97 降低到 0。76 GPa，TMSAc 分数从 25.0% 增加到 92.3%。所制备涂层的疏水性程度根据所观察到的与施加的单体比例相对应的结构变化而变化。随着 TMSAc 分数的增加，水接触角从 75.0° 逐渐增加到 95.3°。制备的 TMSAc 等离子体聚合物变得更加疏水，烃类物质更密集地整合到表面结构中。