Stereometric and fractal analyses have been performed on the three-dimensional surface microtexture of the sputtered copper indium disulfide films on various substrates. The target used in the sputtering was made from nanoparticles synthesized by the solvothermal route. The effects of substrate on structural and morphological properties of the films were investigated. The obtained CuInS2 films were polycrystalline textured, preferentially oriented in (112) crystallographic direction. Also, the (112) peak intensity changes with the substrate type. From atomic force microscopy (AFM) analysis, it can be concluded that the growth of the film on molybdenum substrate is promising for photovoltaic applications particularly as absorber layer in solar cells. The surface microtexture characterization in terms of surface dimensions, volume, curvature, shape was analyzed according to ISO 25,178–2: 2012 standard.

中文翻译：

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基体类型对基于溶剂热法合成纳米颗粒的射频磁控溅射CuInS2薄膜性能的影响

已经对各种基板上溅射的铜铟二硫化物薄膜的三维表面微观结构进行了立体和分形分析。溅射中使用的靶材由通过溶剂热途径合成的纳米颗粒制成。研究了基材对薄膜结构和形态特性的影响。获得的 CuInS2 薄膜是多晶织构的，优先取向在（112）晶向。此外，(112) 峰强度随衬底类型而变化。从原子力显微镜 (AFM) 分析可以得出结论，钼基板上薄膜的生长有希望用于光伏应用，特别是作为太阳能电池中的吸收层。根据表面尺寸、体积、曲率、