Abstract

A micromechanical accelerometer (MMA) is used to measure the acceleration based on the change in frequency of the resonator when the acceleration is caused by the displacement of the inertial mass. Its sensitivity can be influenced by factors such as vibration noise and temperature. In this study, using the calculation and modeling in the ANSYS program, the influence of the temperature on the natural oscillation frequency of resonators of various designs has been studied. It is shown that in a number of the studied designs of frequency MMA resonators, the frequency change ∆f₀ caused by an increase in temperature is comparable and even exceeds the change in the frequency due to the acceleration effect. It is shown that the known designs of resonators whose operation is based on the oscillations of a beam fixed at both ends do not ensure the stability of oscillations at their natural frequency with a change in temperature. For resonators based on the oscillations of a cantilever beam, the frequency barely changes due to the increase in temperature. The best result from the point of view of the temperature’s stability is obtained for a resonator in the form of a cantilever beam with the beam resonator inside it, for which the frequency change ∆f₀ with the temperature increasing up to 70°C was only 4 Hz. The study of the basic MMA construction, consisting of an inertial mass with a resonator made in the form of a cantilever beam with a resonator inside shows that the natural oscillation frequency of this construction is stable when the temperature increases up to 70°C. In this case, the sensitivity is 130 Hz/g and does not depend on temperature.

中文翻译：

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研究温度对频率微机械加速度计谐振器工作的影响

摘要

当由惯性质量的位移引起加速度时，微机械加速度计（MMA）用于基于谐振器频率的变化来测量加速度。它的灵敏度会受到诸如振动噪声和温度等因素的影响。在这项研究中，使用ANSYS程序中的计算和建模，研究了温度对各种设计的谐振器的自然振荡频率的影响。结果表明，在许多已研究的频率MMA谐振器设计中，频率变化∆ f ₀由于加速作用，温度升高引起的频率可比，甚至超过频率的变化。已经表明，其工作是基于固定在两端的光束的振荡的谐振器的已知设计不能保证随着温度变化其固有频率的振荡的稳定性。对于基于悬臂梁振动的谐振器，频率几乎不会因温度升高而变化。从温度稳定性的角度来看，对于悬臂梁形式的谐振器，其内部具有波束谐振器，可获得最佳结果，其频率变化∆ f ₀温度升高到70°C时仅为4 Hz。对基本MMA结构的研究表明，该结构由一个惯性质量和一个谐振器组成，该谐振器以悬臂梁的形式制成，并在内部具有谐振器，该谐振器的固有振动频率在温度升高到70°C时是稳定的。在这种情况下，灵敏度为130 Hz / g，与温度无关。