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Finite Element Modeling of the Membrane Module
Russian Microelectronics Pub Date : 2020-03-10 , DOI: 10.1134/s1063739719070023
V. V. Amelichev , D. M. Grigoryev , A. A. Reznev

Abstract

The design and size of the membrane module package have a significant impact on its characteristics. It is necessary to use the finite element modeling calculation of the frequency response of the membrane module’s membrane due to the complexity of the package design. In this study the method of the thin dielectric membrane modeling by the structural and acoustic analysis in the ANSYS software is proposed. This method allows us to perform the calculation taking into account the influence of the front and back chamber size. The dependences of resonance frequency of the front chamber and back chamber on its geometric sizes are obtained. It is shown that by increasing the back chamber size, the value of the membrane sensitivity approaches its value in the open space. The membrane modules’ frequency response is compared and it shown that the presence of the front and back chambers significantly affects the values of the resonance frequency and sensitivity. The method of setting residual stresses in the membrane using thermal impact is used. A complicatedly deformed state of the membrane, called the buckling effect, is obtained. The dielectric membrane’s sensitivity with allowance for the buckling effect is calculated. The results are analyzed and it is shown that the calculated sensitivity of the membrane taking the buckling effect into account has a good coincidence with the measurement results. The proposed method enables us to calculate the membrane module’s frequency response taking the influence of the package design’s peculiarities into account and also the residual stresses in the membrane. The use of structural-acoustic analysis enables us to achieve more accurate results while calculating the membrane frequency response, which increases the efficiency of designing the acoustic pressure transducers, and ensures achieving the product’s optimal characteristics.


中文翻译:

膜组件的有限元建模

摘要

膜组件包装的设计和尺寸对其特性有重大影响。由于包装设计的复杂性,有必要对膜模块的膜的频率响应进行有限元建模计算。在这项研究中,提出了通过ANSYS软件中的结构和声学分析对薄介电膜建模的方法。这种方法使我们能够在考虑前腔和后腔尺寸的影响的情况下执行计算。获得了前腔和后腔的共振频率对其几何尺寸的依赖性。结果表明,通过增加后腔的尺寸,膜灵敏度的值接近其在开放空间中的值。比较了膜组件的频率响应,结果表明前腔和后腔的存在会显着影响共振频率和灵敏度的值。使用通过热冲击在膜中设置残余应力的方法。膜的复杂变形状态称为屈曲效应。计算介电膜的灵敏度并考虑屈曲效应。对结果进行分析,结果表明,考虑到屈曲效应的膜的灵敏度与测量结果具有良好的一致性。所提出的方法使我们能够在考虑包装设计特点的影响以及膜中的残余应力的情况下计算膜组件的频率响应。
更新日期:2020-03-10
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