Abstract

The parameter homogeneity of dielectrics imposes increasingly stringent requirements, especially when used in micro- and nanoelectronics products. In this paper, we present an automated method for monitoring the electrophysical parameters of planar dielectrics with increased requirements on accuracy and resolution. A brief review and comparative analysis of the known methods for monitoring the parameters of solid dielectrics are performed here. The method of microwave control of the heterogeneities of the parameters of planar dielectrics by the wave characteristics of a scanning microstrip line (MSL) using a Radon transform is described. The phase response of the MSL is shown to be most sensitive to parameter heterogeneities. A mathematical model for processing the MSL wave characteristics and for constructing a map of the parameter heterogeneity distribution is presented. The parameter realizability and the applicability limits of the mathematical model are estimated. The technical implementation of the method is considered using, as an example, the setup for monitoring the parameter homogeneity of planar dielectrics and the results of modeling the measuring part of the setup in the AWR Microwave Office CAD system. The methodological errors of measuring the electrophysical parameters of dielectrics by the described method are estimated, and they are on average ±1 × 10^–4 in the case of measuring the permittivity and 0.2 mm in the case of measuring the spatial resolution according to the preliminary calculations. The described control method is designed for use in the production of electronic products using dielectric materials with a high level of parameter repeatability.

中文翻译：

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使用扫描微带线控制电介质电物理参数非均质性的无线电波方法

摘要

电介质的参数均匀性提出了越来越严格的要求，尤其是在微电子和纳米电子产品中使用时。在本文中，我们提出了一种对平面电介质的电物理参数进行监测的自动化方法，其对精度和分辨率的要求不断提高。这里对已知的用于监视固体电介质参数的方法进行了简要回顾和比较分析。描述了通过使用Radon变换的扫描微带线（MSL）的波特性对平面电介质参数的异质性进行微波控制的方法。已显示MSL的相位响应对参数异质性最敏感。提出了用于处理MSL波特征并构建参数异质性分布图的数学模型。估计了数学模型的参数可实现性和适用范围。例如，使用监视平面电介质参数均匀性的设置以及在AWR Microwave Office CAD系统中对设置的测量部分进行建模的结果来考虑该方法的技术实现。估计通过上述方法测量电介质的电物理参数的方法学误差，平均为±1×10 用于监视平面电介质参数均匀性的设置，以及在AWR Microwave Office CAD系统中对设置的测量部分进行建模的结果。估计通过上述方法测量电介质的电物理参数的方法学误差，平均为±1×10 用于监视平面电介质参数均匀性的设置，以及在AWR Microwave Office CAD系统中对设置的测量部分进行建模的结果。估计通过上述方法测量电介质的电物理参数的方法学误差，平均为±1×10根据初步计算，在测量介电常数时为^–4，在测量空间分辨率时为0.2 mm。所描述的控制方法被设计用于具有高参数重复性的使用介电材料的电子产品的生产中。